conference paper
Thermal-mechanical detector array with integrated diffraction grating
2007
2007 Ieee Leos Annual Meeting Conference Proceedings
An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve <50mK NETD using a 12 bit CCD camera.
Type
conference paper
Author(s)
Ferhanoglu, O.
Toy, M. F.
Unal, G.
Kalyoncu, H.
Kabuli, G.
Caliskan, A. U.
Urey, H.
Date Issued
2007
Published in
2007 Ieee Leos Annual Meeting Conference Proceedings
Start page
836
End page
837
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Lake Buena Vista, FL | Oct 21-25, 2007 | |
Available on Infoscience
January 21, 2011
Use this identifier to reference this record