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  4. Silk Fibroin as a Resist for Thermal Scanning Probe Lithography
 
conference presentation

Silk Fibroin as a Resist for Thermal Scanning Probe Lithography

Zimmermann, Samuel
•
Wang, Ya  
•
Zhang, Xiaosheng  
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2017
43rd Micro and Nano Engineering Conference

We present for the first time nano-scale patterning of silk fibroin with a thermal scanning probe to locally convert water-insoluble crystalline silk into the water-soluble phase. Our first experiments demonstrate silk as a fully water-based resist for thermal scanning probe lithography with an achieved half-pitch resolution of 50.5±3 nm.

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Silk_t-SPL_MNE2017_SZi.pdf

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MNE2017 Abstract_Samuel Zimmermann_v7.pdf

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