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  4. Inkjet-printed SU-8 Hemispherical Microcapsules and Silicon chip Embedding
 
research article

Inkjet-printed SU-8 Hemispherical Microcapsules and Silicon chip Embedding

Jacot-Descombes, Loïc  
•
Gullo, Rosario Maurizio  
•
Mastrangeli, Massimo  
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2013
Micro & Nano Letters

Planar lithography techniques are not effective for precise fabrication of microdevices with hemispherical shapes. Drop-on-demand (DOD) inkjet printing (IJP) of photo-curable ink is a more appropriate fabrication approach as it takes advantage of the surface tension as well as of the delivery of a well-defined ink volume. Described is a DOD IJP technique onto geometrically-patterned silicon substrates enabling the controlled fabrication of SU-8 hemispherical microcapsules. Open half capsules of 100 µm in diameter with inner cavity volumes of 5, 20 and 45 pl with a printing yield above 96% are demonstrated. The same technique is directly adapted to the fabrication of microcapsules embedding silicon microchips. The reported findings open new paths for controlled encapsulation of liquids into smart microsystems.

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Type
research article
DOI
10.1049/mnl.2013.0241
Author(s)
Jacot-Descombes, Loïc  
Gullo, Rosario Maurizio  
Mastrangeli, Massimo  
Cadarso, Victor Javier  
Brugger, Jürgen  
Date Issued

2013

Published in
Micro & Nano Letters
Volume

8

Issue

10

Start page

633

End page

636

Subjects

surface tension

•

ink jet printing

•

microcapsules

•

chip embedding

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS1  
Available on Infoscience
September 23, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/94781
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