conference paper
Polysilicon Surface Micromachinig for the Fabrication of Thermally Isolated Micro-Igniters
2003
Eurosensors XVII
Type
conference paper
Author(s)
Date Issued
2003
Published in
Eurosensors XVII
Start page
408
End page
409
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record