conference paper
Polysilicon piezoresistive cantilevers for intermolecular force detection
2005
5th Spanish Conference on Electron Devices (CDE)
Type
conference paper
Author(s)
Date Issued
2005
Published in
5th Spanish Conference on Electron Devices (CDE)
Start page
495
End page
498
Note
Times Cited: 0, 5th Spanish Conference on Electron Devices, FEB 02-04, 2005, Tarragona, SPAIN
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
| Event name | Event place | Event date |
Tarragona, Spain | 2005 | |
Available on Infoscience
August 6, 2013
Use this identifier to reference this record