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  4. Heterogeneous integration of ReRAM crossbars in a CMOS foundry chip
 
conference paper

Heterogeneous integration of ReRAM crossbars in a CMOS foundry chip

Sandrini, Jury  
•
Cevrero, Alessandro  
•
Demirci, Tugba  
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2014
Proceedings of the 40th International Micro and Nano Engineering Conference (MNE)
40th International Micro and Nano Engineering Conference (MNE)

In this paper, we present a heterogeneous integration of ReRAMs with standard CMOS technology by post-processing the Back-End-of-the-Line (BEOL) of fully finished CMOS chips.

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mne_2014_reram_final.pdf

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