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  4. Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics
 
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conference paper

Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics

Spettel, Jasmin  
•
Liffredo, Marco  
•
Cassese, Tommaso
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January 1, 2022
2022 European Conference On Optical Communication (Ecoc)
European Conference on Optical Communication (ECOC)

Aluminium nitride is a promising photonic material from the ultra-violet to the mid-infrared spectral range. We present spectroscopic ellipsometry of sputtered AlN thin films on insulator in the spectral range 0.19 mu m - 25 mu m, surface roughness characterization, waveguide and grating coupler designs at telecom wavelength. (C) 2022 The Author(s)

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Type
conference paper
Web of Science ID

WOS:000925380500110

Author(s)
Spettel, Jasmin  
•
Liffredo, Marco  
•
Cassese, Tommaso
•
Furci, Hernan  
•
Dubois, Florian
•
Quack, Niels  
•
Moridi, Mohssen
•
Villanueva, Guillermo  
•
Thang Duy Dao
Date Issued

2022-01-01

Publisher

IEEE

Publisher place

New York

Published in
2022 European Conference On Optical Communication (Ecoc)
ISBN of the book

978-1-957171-15-9

Subjects

Optics

•

Telecommunications

•

Optics

•

Telecommunications

•

thin-films

•

generation

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Event nameEvent placeEvent date
European Conference on Optical Communication (ECOC)

ELECTR NETWORK

Sep 18-22, 2022

Available on Infoscience
March 27, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/196479
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