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conference paper
Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics
January 1, 2022
2022 European Conference On Optical Communication (Ecoc)
Aluminium nitride is a promising photonic material from the ultra-violet to the mid-infrared spectral range. We present spectroscopic ellipsometry of sputtered AlN thin films on insulator in the spectral range 0.19 mu m - 25 mu m, surface roughness characterization, waveguide and grating coupler designs at telecom wavelength. (C) 2022 The Author(s)
Type
conference paper
Web of Science ID
WOS:000925380500110
Authors
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Cassese, Tommaso
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Dubois, Florian
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Moridi, Mohssen
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Thang Duy Dao
Publication date
2022-01-01
Publisher
Published in
2022 European Conference On Optical Communication (Ecoc)
ISBN of the book
978-1-957171-15-9
Publisher place
New York
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
ELECTR NETWORK | Sep 18-22, 2022 | |
Available on Infoscience
March 27, 2023
Use this identifier to reference this record