book part or chapter
Microsystems and Sensors
2011
Femtosecond Laser Micromachining
In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discussed.
Type
book part or chapter
Author(s)
Editors
Osellame, Roberto
•
Cerullo, Giulio
•
Ramponi, Roberta
Date Issued
2011
Publisher
Publisher place
Berlin, Heidelberg
Published in
Femtosecond Laser Micromachining
ISBN of the book
978-3-642-23365-4
Start page
443
End page
465
Series title/Series vol.
Topics in Applied Physics
Written at
OTHER
EPFL units
Available on Infoscience
July 20, 2015
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