conference paper
Fabrication of electrically insulated microchannels in silicon (poster)
2000
Eurosensors XIV 14th European Conference on Solid-State Transducers
Type
conference paper
Author(s)
Date Issued
2000
Published in
Eurosensors XIV 14th European Conference on Solid-State Transducers
Start page
463
End page
466
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record