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conference paper
Monolithic integration in Fused Silica: When Fluidics, Mechanics and Optics meet in a single substrate
2009
ISOT: 2009 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES
We show that locally altering fused silica with femtosecond laser irradiation forms the basis for a novel manufacturing technology platform to produce highly integrated microsystems. In contrast to many common approaches that rely on combining materials to achieve particular functions, our scheme utilizes a single piece of material, whose properties are locally modified using femtosecond laser irradiation. This microsystem fabrication method is not only particularly attractive for optofluidics instruments but also for optomechanical devices.
Type
conference paper
Authors
Publication date
2009
Published in
ISOT: 2009 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES
Start page
435
End page
440
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Istanbul, Turkey | September 21-23, 2009 | |
Available on Infoscience
July 20, 2015
Use this identifier to reference this record