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  4. Tuning the resonance frequencies and mode shapes in a large range multi-degree of freedom micromirror
 
research article

Tuning the resonance frequencies and mode shapes in a large range multi-degree of freedom micromirror

Morrison, Jessica
•
Imboden, Matthias
•
Bishop, David J.
2017
Optics Express

The ability to actively shift the primary resonance of a 2D scanning micromirror allows the user to set the scanning direction, set the scanning frequency, and lift otherwise degenerate modes in a symmetrically designed system. In most cases, resonant scanning micromirrors require frequency stability in order to perform imaging and projection functions properly. This paper suggests a method to tune the tip and tilt resonant frequencies in real time while actively suppressing or allowing degeneracy of the two modes in a symmetric electrothermal micromirror. We show resonant frequency tuning with a range of degeneracy separation of 470 Hz or by approximately +/- 15% and controllable coupling. (C)2017 Optical Society of America

  • Details
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Type
research article
DOI
10.1364/Oe.25.007895
Web of Science ID

WOS:000398536000067

Author(s)
Morrison, Jessica
Imboden, Matthias
Bishop, David J.
Date Issued

2017

Publisher

Optical Soc Amer

Published in
Optics Express
Volume

25

Issue

7

Start page

7895

End page

7906

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
IMT  
Available on Infoscience
May 1, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/136759
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