conference paper

Co-integration of gate-all-around MOSFETs and local silicon-on insulator optical waveguides on bulk silicon for GHz on-chip optical signaling

Moselund, K. E.  
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Tschuor, L.
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Bouvet, D.  
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2006
Proceedings of IEEE 2006 silicon nanoelectronics workshop, VLSI 2006 workshop