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conference paper
Microsystems for diverse applications using recently developed microfabrication techniques
2000
MOEMS and Miniaturized Systems
Type
conference paper
Author(s)
Dellmann, L.
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•
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Guenat, O.
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Guldimann, B.
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Luginbuhl, Ph.
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Marxer, C.
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Staufer, U.
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van der Schoot, B.
Date Issued
2000
Published in
MOEMS and Miniaturized Systems
Start page
16
End page
27
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record