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  4. Large linear micromirror array for UV femtosecond laser pulse shaping
 
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conference paper

Large linear micromirror array for UV femtosecond laser pulse shaping

Waldis, S.
•
Weber, S.M.
•
Noell, N.
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2008
Proceedings of the IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation)or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively.

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Type
conference paper
DOI
10.1109/OMEMS.2008.4607817
Author(s)
Waldis, S.
•
Weber, S.M.
•
Noell, N.
•
Extermann, J.
•
Kiselev, D.
•
Bonacina, L.
•
Wolf, J.P.
•
de Rooij, N.F.  
Date Issued

2008

Published in
Proceedings of the IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
Volume

1

Start page

39

End page

40

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
IEEE/LEOS International Conference on Optical MEMS and Nanophotonics

Freiburg

August 11-18, 2008

Available on Infoscience
January 21, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/45845
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