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research article

Radio-frequency capacitively coupled plasma parameters evolution as a function of magnetic field strength

Hiret, Paul
•
Dmitriev, Artem
•
Faudot, Éric
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September 1, 2025
Vacuum

The use of magnetic fields in low-temperature plasma physics is promising in numerous applications. The magnetic field acts on the kinetic of the plasma charged particles, drastically modifying the ion and electron trajectories in the plasma. The influence of the magnetic field strength on plasma parameters, like the plasma and the electrode potentials, was measured for different gases and pressures, evidencing a strong variation before saturating for high magnetic fields. The saturation is connected to the variation of the ions and electrons collection area. It occurred when the magnetic field influence overcame the collisional effect, i.e. when the Larmor radius of ions became smaller than the ion mean free path. The electrostatic probe's floating potential saturation was a marker of ion magnetisation. Varying the pressure enabled collision cross-section calculation for magnetised discharges. The estimated values in this contribution were consistent with the literature. Finally, the probe developed in this contribution allows for the quasi-independent measurement of perpendicular and parallel flux.

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Type
research article
DOI
10.1016/j.vacuum.2025.114349
Scopus ID

2-s2.0-105004259087

Author(s)
Hiret, Paul

Universität Basel

Dmitriev, Artem

Universität Basel

Faudot, Éric

Institut Jean Lamour

Moritz, Jérôme

Institut Jean Lamour

Heuraux, Stéphane

Institut Jean Lamour

Brochard, Frédéric

Institut Jean Lamour

Steiner, Roland

Universität Basel

Marot, Laurent

Universität Basel

Geraldini, Alessandro  

École Polytechnique Fédérale de Lausanne

Furno, Ivo  

École Polytechnique Fédérale de Lausanne

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Date Issued

2025-09-01

Published in
Vacuum
Volume

239

Article Number

114349

Subjects

Electrostatic probe

•

Floating potential

•

Langmuir probe

•

Low-temperature plasma

•

Magnetic field

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SPC-TH  
SPC-LTP2A  
FunderFunding(s)Grant NumberGrant URL

Swiss Federal Office of Energy

Swiss Nanoscience Institute

Federal Office for Education and Science

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Available on Infoscience
May 13, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/250093
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