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conference paper not in proceedings
Tungsten Through Silicon Vias for 3D high quality factor embedded RF MEMS inductors
2013
Type
conference paper not in proceedings
Authors
•
Fernández-Bolaños Badía, Montserrat
•
Wieland, Robert
•
Weber, Josef
•
Klumpp, Armin
•
Ramm, Peter
•
Publication date
2013
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
London, UK | September 16-19, 2013 | |
Available on Infoscience
November 4, 2013
Use this identifier to reference this record