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conference paper
A High-Resolution Photonic Integrated High Q Microresonator Based Accelerometer
2023
CLEO: Science and Innovations, CLEO:S and I 2023
We demonstrated a packaged optomechanical accelerometer with resolution of 850ng. The resonance of a 4 million Q Si3N4 microring resonator is modulated by the stress in springs of a released milligram proof mass upon acceleration.
Type
conference paper
Scopus ID
2-s2.0-85191493277
Authors
Tian, Hao
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Attanasio, Alaina G.
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Wang, Rui N.
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Bhave, Sunil A.
Publication date
2023
Publisher
Published in
CLEO: Science and Innovations, CLEO:S and I 2023
ISBN of the book
9781957171258
Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event acronym | Event place | Event date |
San Jose, United States | 2023-05-07 - 2023-05-12 | ||
Available on Infoscience
January 26, 2025
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