conference paper
A High-Resolution Photonic Integrated High Q Microresonator Based Accelerometer
2023
CLEO: Science and Innovations, CLEO:S and I 2023
We demonstrated a packaged optomechanical accelerometer with resolution of 850ng. The resonance of a 4 million Q Si3N4 microring resonator is modulated by the stress in springs of a released milligram proof mass upon acceleration.
Type
conference paper
Scopus ID
2-s2.0-85191493277
Author(s)
Tian, Hao
Purdue University
École Polytechnique Fédérale de Lausanne
Attanasio, Alaina G.
Purdue University
École Polytechnique Fédérale de Lausanne
Wang, Rui N.
École Polytechnique Fédérale de Lausanne
École Polytechnique Fédérale de Lausanne
École Polytechnique Fédérale de Lausanne
Bhave, Sunil A.
Purdue University
Date Issued
2023
Publisher
Published in
CLEO: Science and Innovations, CLEO:S and I 2023
ISBN of the book
9781957171258
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event acronym | Event place | Event date |
San Jose, United States | 2023-05-07 - 2023-05-12 | ||
| Funder | Funding(s) | Grant Number | Grant URL |
Quantum Science Center | |||
European Space Technology Centre | |||
U.S. Department of Energy | |||
| Show more | |||
Available on Infoscience
January 26, 2025
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