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research article

Quantitative thermal microscopy using thermoelectric probe in passive mode

Bontempi, A.
•
Thiery, L.
•
Teyssieux, D.
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2013
Review of Scientific Instruments

A scanning thermal microscope working in passive mode using a micronic thermocouple probe is presented as a quantitative technique. We show that actual surface temperature distributions of microsystems are measurable under conditions for which most of usual techniques cannot operate. The quantitative aspect relies on the necessity of an appropriate calibration procedure which takes into account of the probe-to-sample thermal interaction prior to any measurement. Besides this consideration that should be treated for any thermal contact probing system, the main advantages of our thermal microscope deal with the temperature available range, the insensitivity to the surface optical parameters, the possibility to image DC, and AC temperature components up to 1 kHz typically and a resolution limit related to near-field behavior. (C) 2013 AIP Publishing LLC.

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Type
research article
DOI
10.1063/1.4824069
Web of Science ID

WOS:000326645300024

Author(s)
Bontempi, A.
•
Thiery, L.
•
Teyssieux, D.
•
Briand, D.  
•
Vairac, P.
Date Issued

2013

Publisher

American Institute of Physics

Published in
Review of Scientific Instruments
Volume

84

Issue

10

Article Number

103703

Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
October 9, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/96157
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