Loading...
conference paper
High Performance Copper / Polyimide Inductors Fabricated Using Thick Double Metal Layer Damascene Process
2005
6th Workshop on MEMS for MillimeterWAVE communications (MEMSWAVE 2005)
Type
conference paper
Authors
Publication date
2005
Published in
6th Workshop on MEMS for MillimeterWAVE communications (MEMSWAVE 2005)
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
May 16, 2007
Use this identifier to reference this record