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review article

Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices

Pinto-Gomez, Christian
•
Perez-Murano, Francesc
•
Bausells, Joan
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October 1, 2020
Polymers

Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that has attracted high interest in recent years due to its inherent simplicity, high throughput, low cost and potential for sub-10 nm resolution. In this paper, we review the main principles of directed self-assembly of block copolymers and give a brief overview of some of the most extended applications. We present a novel fabrication route based on the introduction of directed self-assembly of block copolymers as a patterning option for the fabrication of nanoelectromechanical systems. As a proof of concept, we demonstrate the fabrication of suspended silicon membranes clamped by dense arrays of single-crystal silicon nanowires of sub-10 nm diameter. Resulting devices can be further developed for building up high-sensitive mass sensors based on nanomechanical resonators.

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polymers-12-02432.pdf

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Publisher's Version

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http://purl.org/coar/version/c_970fb48d4fbd8a85

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openaccess

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CC BY

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3.08 MB

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Adobe PDF

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d458ff1e780f2eb8159be640c568e0f3

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