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research article

Surface morphology of GaN grown by molecular beam epitaxy

Vezian, S.
•
Massies, J.
•
Semond, F.
Show more
2001
Materials Science and Engineering B-Solid State Materials for Advanced Technology

The surface morphology of GaN(0001) grown on Si(111) by molecular beam epitaxy using ammonia has been studied by near-field microscopy techniques. Two distinct morphologies are observed, depending on the growth kinetics. When using Ga-rich growth conditions, the roughness is independent of the epitaxial layer thickness, while it increases with growth time under N-rich growth conditions. Also, the morphological pattern is different for the two regimes of growth and is not related to the crystallographic subgrains delimited by edge dislocations. However, under Ga-rich growth conditions, screw-type dislocations give rise to a spiral growth mode that imposts both the morphological pattern and the surface roughness. (C) 2001 Elsevier Science B.V. All rights reserved.

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Type
research article
DOI
10.1016/S0921-5107(00)00707-8
Author(s)
Vezian, S.
•
Massies, J.
•
Semond, F.
•
Grandjean, N.  
Date Issued

2001

Published in
Materials Science and Engineering B-Solid State Materials for Advanced Technology
Volume

82

Issue

1-3

Start page

56

End page

58

Subjects

AFM

•

GaN

•

MBE

•

STM

•

surface morphology

•

GAN(0001)

•

SI(111)

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LASPE  
Available on Infoscience
October 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/54965
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