research article
Nanomoulding of functional materials, a versatile complementary pattern replication method to nanoimprinting
We describe a nanomoulding technique which allows low-cost nanoscale patterning of functional materials, materials stacks and full devices. Nanomoulding combined with layer transfer enables the replication of arbitrary surface patterns from a master structure onto the functional material. Nanomoulding can be performed on any nanoimprinting setup and can be applied to a wide range of materials and deposition processes. In particular we demonstrate the fabrication of patterned transparent zinc oxide electrodes for light trapping applications in solar cells.
Type
research article
Author(s)
Date Issued
2013
Published in
Issue
71
Article Number
e50177
Note
IMT-NE Number: 686
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
February 22, 2013
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