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conference paper
Tilting Out-Of-Plane Platform For Optical Applications
2002
IEEE/LEOS International Conference on Optical MEMS
Type
conference paper
Authors
Overstolz, T.
•
Clerc, P.-A.
•
Gale, M. T.
•
•
Niederer, G.
•
•
Sachtig, J.
•
Thiele, H.
•
Publication date
2002
Published in
IEEE/LEOS International Conference on Optical MEMS
Start page
81
End page
82
Peer reviewed
NON-REVIEWED
Written at
OTHER
Available on Infoscience
May 12, 2009
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