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conference paper
Optical measurement of the global and local geometry of grating structures
1998
Diffractive Optics and Micro-Optics
Type
conference paper
Authors
Publication date
1998
Published in
Diffractive Optics and Micro-Optics
Series title/Series vol.
1998 Technical Digest Series, vol. 10
Start page
DThA2
End page
1/247
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record