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  4. Liquid-Filled Sealed Mems Capsules Fabricated By Fluidic Self-Assembly
 
conference paper

Liquid-Filled Sealed Mems Capsules Fabricated By Fluidic Self-Assembly

Mastrangeli, Massimo  
•
Jacot-Descombes, Loic
•
Gullo, Maurizio R.
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2014
IEEE 27th International Conference On Micro Electro Mechanical Systems (MEMS 2014)
IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)

We present a new method to encapsulate functional liquids into sealed MEMS capsules by fluidic self-assembly. Self-assembly of 200 mu m SU-8 cargos and picoliter liquid co-encapsulation are driven by the interplay of global fluidic drag and short-range capillary forces. The latter ensues from the localized surface-selective precipitation of a photopolymerizable adhesive onto the capsules' rim. Assembly yield higher than 50% is achieved, and can be improved by optimized agitation and shape matching. The method is massively parallel, scalable and compatible with batch MEMS fabrication. It can address a variety of applications, including distributed MEMS, cell encapsulation and drug delivery.

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