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  4. On the influence of the buffer layer on the optical quality of AlN-on-sapphire epilayers for photonic integrated devices
 
conference paper

On the influence of the buffer layer on the optical quality of AlN-on-sapphire epilayers for photonic integrated devices

Brunetta, Samuele  
•
Sbarra, Samantha  
•
Carlin, Jean François  
Show more
Garcia-Blanco, Sonia M.
•
Cheben, Pavel
2025
Integrated Optics: Devices, Materials, and Technologies XXIX;
29 Integrated Optics: Devices, Materials, and Technologies

In the last decade, aluminum nitride (AlN) has proven to be an attractive material for both linear and nonlinear integrated photonics, due to its large transparency window, its low propagation losses and the presence of both second- and third-order nonlinear optical susceptibilities. However, the investigation and optimization of AlN layers for photonic applications have been scarcely explored in the literature so far, although it represents an important stepping stone upon which will impact the final performance of AlN-based devices. Here we present a systematic comparison of various types of AlN epilayers grown on sapphire by metalorganic vapor-phase epitaxy. Optical losses are measured from waveguides and microring resonators fabricated from different AlN epilayers. The results are analyzed through a comprehensive material characterization study, showing the need to optimize growth techniques to further push the performance of AlN-on-sapphire photonic devices.

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Type
conference paper
DOI
10.1117/12.3041202
Scopus ID

2-s2.0-105002401074

Author(s)
Brunetta, Samuele  
•
Sbarra, Samantha  
•
Carlin, Jean François  
•
Grandjean, Nicolas  
•
Brès, Camille Sophie  
•
Butté, Raphaël  
Editors
Garcia-Blanco, Sonia M.
•
Cheben, Pavel
Date Issued

2025

Publisher

SPIE

Published in
Integrated Optics: Devices, Materials, and Technologies XXIX;
ISBN of the book

9781510684867

Book part number

13369

Series title/Series vol.

Proceedings of SPIE; 13369

ISSN (of the series)

0277-786X

Article Number

133690I

Subjects

Aluminum nitride

•

Integrated photonics

•

Material quality

•

Microring resonators

•

MOVPE

•

Propagation losses

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LASPE  
PHOSL  
Event nameEvent acronymEvent placeEvent date
29 Integrated Optics: Devices, Materials, and Technologies

San Francisco, California, United States

2025-01-27 - 2025-01-30

FunderFunding(s)Grant NumberGrant URL

EPFL Science Seed Fund

Swiss National Science Foundation

200020-215633

Available on Infoscience
April 29, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/249564
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