research article
Ultrafast Uv-Laser-Induced Oxidation of Silicon - Control and Characterization of the Si-Sio2 Interface
Type
research article
Author(s)
Date Issued
1984
Published in
Volume
56
Issue
8
Start page
2351
End page
2355
Note
Univ wisconsin,dept phys,madison,wi 53706. Richter, h, xerox corp,webster res ctr,rochester,ny 14644.
ISI Document Delivery No.: TL568
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
Available on Infoscience
October 3, 2006
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