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Resistless ion implantation of sub-micron scale features through nano-stencil

Villanueva, G.  
•
Martin, C.
•
Vazquez-Mena, O.  
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2008
34th International Conference on Micro- and Nano Engineering 2008 (MNE 2008)

Resistless ion implantation of sub-micron scale features through nano-stencil

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Villanueva_2008_MNE.pdf

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