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conference paper
MEMS Tunable Capacitor with laterally driven fragmented electrodes and electro-thermal actuation
2006
MEMSWAVE 2006
Type
conference paper
Authors
Publication date
2006
Published in
MEMSWAVE 2006
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
May 16, 2007
Use this identifier to reference this record