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  4. Deterministic grayscale nanotopography to engineer mobilities in strained MoS<inf>2</inf> FETs
 
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Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs

Liu, Xia  
•
Erbas, Berke  
•
Conde-Rubio, Ana  
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December 1, 2024
Nature Communications

Field-effect transistors (FETs) based on two-dimensional materials (2DMs) with atomically thin channels have emerged as a promising platform for beyond-silicon electronics. However, low carrier mobility in 2DM transistors driven by phonon scattering remains a critical challenge. To address this issue, we propose the controlled introduction of localized tensile strain as an effective means to inhibit electron-phonon scattering in 2DM. Strain is achieved by conformally adhering the 2DM via van der Waals forces to a dielectric layer previously nanoengineered with a gray-tone topography. Our results show that monolayer MoS2 FETs under tensile strain achieve an 8-fold increase in on-state current, reaching mobilities of 185 cm²/Vs at room temperature, in good agreement with theoretical calculations. The present work on nanotopographic grayscale surface engineering and the use of high-quality dielectric materials has the potential to find application in the nanofabrication of photonic and nanoelectronic devices.

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Name

10.1038_s41467-024-51165-4.pdf

Type

Main Document

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

openaccess

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CC BY

Size

2.14 MB

Format

Adobe PDF

Checksum (MD5)

357ab83bf8666336ef6935ead89e00a3

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