conference paper
A 3D-Printed Functional Mems Accelerometer
January 1, 2023
2023 Ieee 36Th International Conference On Micro Electro Mechanical Systems, Mems
3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the resonance frequency, the responsivity, and the signal stability over a period of 10 h of the 3D-printed accelerometer.
Type
conference paper
Web of Science ID
WOS:000975359200156
Author(s)
Pagliano, Simone
•
Marschner, David E.
•
•
Ehrmann, Nils
•
Stemme, Goran
•
Braun, Stefan
•
•
Niklaus, Frank
Date Issued
2023-01-01
Publisher
Publisher place
New York
Published in
2023 Ieee 36Th International Conference On Micro Electro Mechanical Systems, Mems
ISBN of the book
978-1-6654-9308-6
Series title/Series vol.
Proceedings IEEE Micro Electro Mechanical Systems
Start page
594
End page
597
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Munich, GERMANY | Jan 15-19, 2023 | |
Available on Infoscience
June 5, 2023
Use this identifier to reference this record