conference paper
MEMS Opportunities & Challenges for Applied Research
2004
MEMS & NanoTechnology
Type
conference paper
Author(s)
Date Issued
2004
Published in
MEMS & NanoTechnology
Start page
37
End page
76
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record