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conference presentation

Surface microfabricated SU-8 devices with integrated electrodes for scanning probe microscopy

Mouaziz, S  
•
Boero, G  
•
Popovic, R  
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2005
Eurosensors XIX, 19th European conference on Solid-State Transducers

We report here on a new method to release functional SU-8 micro-components with embedded and integrated metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.

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