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research article

Wafer Level Packaging of Micromachined Gas Sensors

Raible, S.
•
Briand, D.  
•
Kappler, J.
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2006
IEEE Sensors
  • Details
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Type
research article
DOI
10.1109/JSEN.2006.881355
Author(s)
Raible, S.
•
Briand, D.  
•
Kappler, J.
•
de Rooij, N. F.  
Date Issued

2006

Published in
IEEE Sensors
Volume

6

Issue

5

Start page

1232

End page

1235

Note

384

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39706
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