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research article

Wafer Level Packaging of Micromachined Gas Sensors

Raible, S.
•
Briand, D. 
•
Kappler, J.
more
2006
IEEE Sensors
Type
research article
DOI
10.1109/JSEN.2006.881355
Authors
Raible, S.
•
Briand, D. 
•
Kappler, J.
•
de Rooij, N. F. 
Publication date

2006

Published in
IEEE Sensors
Volume

6

Issue

5

Start page

1232

End page

1235

Note

384

Peer reviewed

REVIEWED

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SAMLAB 
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39706