Loading...
conference paper
FIB and DRIE combination for nanotip fabrication
2005
5th Spanish Conference on Electron Devices (CDE)
Type
conference paper
Author(s)
Date Issued
2005
Published in
5th Spanish Conference on Electron Devices (CDE)
Start page
443
End page
446
Note
Times Cited: 0, 5th Spanish Conference on Electron Devices, FEB 02-04, 2005, Tarragona, SPAIN
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
| Event name | Event place | Event date |
Tarragona, Spain | 2005 | |
Available on Infoscience
August 6, 2013
Use this identifier to reference this record