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research article

Silicon Pressure Sensor Based on a Resonating Element

Buser, R.
•
de Rooij, N. F.  
•
Schultheis, L.
1991
Sensors and Actuators A
Type
research article
DOI
10.1016/0924-4247(91)87076-F
Author(s)
Buser, R.
•
de Rooij, N. F.  
•
Schultheis, L.
Date Issued

1991

Published in
Sensors and Actuators A
Volume

25-27

Start page

717

End page

722

Note

51

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39128