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research article

Silicon Pressure Sensor Based on a Resonating Element

Buser, R.
•
de Rooij, N. F. 
•
Schultheis, L.
1991
Sensors and Actuators A
Type
research article
DOI
10.1016/0924-4247(91)87076-F
Authors
Buser, R.
•
de Rooij, N. F. 
•
Schultheis, L.
Publication date

1991

Published in
Sensors and Actuators A
Volume

25-27

Start page

717

End page

722

Note

51

Peer reviewed

REVIEWED

EPFL units
SAMLAB 
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39128