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  4. Study of Spark assisted Electrochemical Etching - Force Measurements
 
conference paper

Study of Spark assisted Electrochemical Etching - Force Measurements

Wüthrich, Rolf
•
Fascio, Valia
•
Viquerat, Didier
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2000
Microfactory
International Workshop on Microfactories (IWMF 2000)
  • Details
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Type
conference paper
Author(s)
Wüthrich, Rolf
Fascio, Valia
Viquerat, Didier
Langen, Hans
Date Issued

2000

Publisher

FSRM - Swiss Foundation for Research in Microtechnology

Published in
Microfactory
Start page

201

End page

204

Subjects

SACE

•

glass micro-machining

•

microengineering

•

robotics

•

[SACE]

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSRO  
Event nameEvent placeEvent date
International Workshop on Microfactories (IWMF 2000)

Fribourg (Switzerland)

October 9-10, 2000

Available on Infoscience
June 6, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/230308
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