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  4. Strain engineering and strain measurement by spring tethers on suspended epitaxial GaN-on-Si photonic crystal devices
 
research article

Strain engineering and strain measurement by spring tethers on suspended epitaxial GaN-on-Si photonic crystal devices

Wang, Jun
•
Houdre, Romuald  
February 1, 2024
Semiconductor Science And Technology

Suspended epitaxial gallium nitride (GaN) on silicon (Si) photonic crystal devices suffer from large residual tensile strain, especially for long waveguides, because fine structures tend to crack due to large stress. By introducing spring-like tethers, designed by the combination of a spring network model and finite element method simulations, the stress at critical locations was mitigated and the cracking issue was solved. Meanwhile, the tethered-beam structure was found to be potentially a powerful method for high-precision strain measurement in tensile thin films, and in this case, a strain of 2.27(+/- 0.01)x10-3 was measured in 350 nm epitaxial GaN-on-Si.

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Type
research article
DOI
10.1088/1361-6641/ad1b17
Web of Science ID

WOS:001146979300001

Author(s)
Wang, Jun
Houdre, Romuald  
Date Issued

2024-02-01

Publisher

Iop Publishing Ltd

Published in
Semiconductor Science And Technology
Volume

39

Issue

2

Article Number

025010

Subjects

Technology

•

Physical Sciences

•

Gan On Si

•

Photonic Crystal Devices

•

Strain Engineering

•

Strain Measurement

•

Tensile Thin Films.

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SCI-SB-RH  
FunderGrant Number

Swiss National Science Foundation

200020-169590

Available on Infoscience
February 21, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/205125
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