conference paper
Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters
January 1, 2019
2019 Ieee Mtt-S International Microwave Symposium (Ims)
In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.
Type
conference paper
Web of Science ID
WOS:000494461700132
Author(s)
Plessky, Victor
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Turner, Patrick J.
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Koskela, Julius
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Garcia, Bryant
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Costa, Jim
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Hammond, Robert B.
Date Issued
2019-01-01
Publisher
Publisher place
New York
Published in
2019 Ieee Mtt-S International Microwave Symposium (Ims)
ISBN of the book
978-1-7281-1309-8
Series title/Series vol.
IEEE MTT-S International Microwave Symposium
Start page
512
End page
515
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Boston, MA | Jun 02-07, 2019 | |
Available on Infoscience
November 29, 2019
Use this identifier to reference this record