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conference paper
CVD deposited TA2O5 and HfO2 layers as pH-sensitive layers for ISFETs
2006
IMCS The 11th International Meeting on Chemical Sensors
Type
conference paper
Author(s)
•
•
Mondin, G.
•
Jenny, S.
•
Jeanneret, S.
•
Millon, C.
•
Roussel, H.
•
Dubourdieu, C.
•
Date Issued
2006
Published in
IMCS The 11th International Meeting on Chemical Sensors
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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