Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps

conference paper

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2007

Microsystem Technologies

Type

conference paper

DOI

Web of Science ID

WOS:000245806000036

Authors

•

•

•

Publication date

2007

Published in

Microsystem Technologies

Volume

13

Issue

11-12

Start page

1489

End page

1493

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units

Event name	Event place	Event date
2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006	Stresa, Italy	April 2006

Available on Infoscience

May 16, 2007

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