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conference paper
25.5 Mhz Silicon-on-insulator Bulk-mode Resonators: Design, Fabrication and Electrical Characterization
2005
MEMSWAVE
Type
conference paper
Author(s)
Date Issued
2005
Published in
MEMSWAVE
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
May 16, 2007
Use this identifier to reference this record