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  4. Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit
 
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conference paper

Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit

Lang, Guilain
•
Yandrapalli, Soumya  
•
Villanueva, Guillermo  
January 1, 2021
2021 Joint Conference Of The European Frequency And Time Forum And Ieee International Frequency Control Symposium (Ieee Eftf-Ifcs 2021)
Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS)

In this study, we analyze a 3rd type of FBAR's fundamental mode by finite element method. We show the importance of the substrate's wave velocity and conductivity on the electromechanical coupling efficiency. Then we demonstrate that etching traditional SAW sensors in between its electrodes is an effective solution to increase its performances. Finally, the finite device simulations of optimized geometries demonstrate the full potential of AlSc(0.4)N based SAW/BAW hybrid resonators: an impedance response free of spurious modes and large figure of merit (k(t)(FD, 1.35GHz)(2) = 2.48%).

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Type
conference paper
DOI
10.1109/EFTF/IFCS52194.2021.9604342
Web of Science ID

WOS:000784693000109

Author(s)
Lang, Guilain
•
Yandrapalli, Soumya  
•
Villanueva, Guillermo  
Date Issued

2021-01-01

Publisher

IEEE

Publisher place

New York

Published in
2021 Joint Conference Of The European Frequency And Time Forum And Ieee International Frequency Control Symposium (Ieee Eftf-Ifcs 2021)
ISBN of the book

978-1-6654-3935-0

Series title/Series vol.

Joint European Frequency and Time Forum and International Frequency Control Symposium

Subjects

Automation & Control Systems

•

Computer Science, Information Systems

•

Engineering, Electrical & Electronic

•

Computer Science

•

Engineering

•

aln

•

alscn

•

saw

•

baw

•

hybrid resonators

•

parametric study

•

harsh environment operations

•

piezoelectricity

•

fem

•

comsol multiphysics

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Event nameEvent placeEvent date
Joint Conference of the European-Frequency-and-Time-Forum / IEEE International Frequency Control Symposium (EFTF/IFCS)

ELECTR NETWORK

Jul 07-17, 2021

Available on Infoscience
May 9, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/187599
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