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conference paper

High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates

Leroy, Christine
•
Pisani, Marcelo B. 
•
Hibert, Cyrille 
more
2007
Microsystem Technologies
2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006
Type
conference paper
DOI
10.1007/s00542-006-0364-z
Authors
Leroy, Christine
•
Pisani, Marcelo B. 
•
Hibert, Cyrille 
•
Bouvet, Didier 
•
Puech, M.
•
Ionescu, Adrian M. 
Publication date

2007

Published in
Microsystem Technologies
Volume

13

Issue

11-12

Start page

1483

End page

1487

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB 
CMI 
Event nameEvent placeEvent date
2006 Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, DTIP 2006

Stresa, Italy

April 2006

Available on Infoscience
May 10, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/230088