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research article
On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers
We investigate the effect of martensitic phase transformations on the dynamic response of commercial AFM silicon cantilevers coated with shape memory alloy (SMA) thin films. We propose a simple thermo-mechanical model to predict the phase transformation. We show experimentally that the SMA thin film dynamic response can be actively changed upon heating and cooling. This can be used for vibration control in micro-systems.
Type
research article
Authors
Publication date
2010
Published in
Volume
20
Issue
1
Article Number
015039
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
July 20, 2015
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