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conference paper
Modulated submicron gratings
1994
International Conference on Optical Metrology and Nanontechnology
Type
conference paper
Author(s)
Date Issued
1994
Journal
International Conference on Optical Metrology and Nanontechnology
Series title/Series vol.
EOS Topical Meetings Digests Series Volume 4
Start page
62
End page
63
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record