report
Diborane nitrogen/ammonia plasma chemistry investigated by infrared absorption spectroscopy
1998
Loading...
Name
lrp_626_98_hq.pdf
Access type
openaccess
Size
1.18 MB
Format
Adobe PDF
Checksum (MD5)
dbe2eb0c1215c49d277c345164c185ac
Diborane nitrogen/ammonia plasma chemistry investigated by infrared absorption spectroscopy
lrp_626_98_hq.pdf
openaccess
1.18 MB
Adobe PDF
dbe2eb0c1215c49d277c345164c185ac